The system is mainly on the reverse osmosis water or EDI water of deep treatment, the effluent organic matter, protein, anion and cation, such as particles further reduced to 18MΩ of the resistivity above, at the same time according to the requirement of different users on the water quality of the configured to add the ultraviolet sterilizer and nuclear grade resin with low organic ultrapure water terminal processing system, to meet the different requirements.